Engineering · Year 3 · Semester 1 · PDF

Micro-Electromechanical Systems (MEMS)

MEMS · BITS Pilani, Dubai Campus

MEMSMicrosystemsSensorsActuatorsMicrofabricationECE

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Micro-electromechanical systems, or MEMS, is where electronics and mechanics meet at microscale. I took this course in my third year, first semester, at BITS Pilani, Dubai Campus, in electronics and communication engineering. These notes cover microfabrication techniques, microsensor and actuator design, and the applications of MEMS.

In two thousand thirteen, I started sharing my handwritten study notes online so others could learn from them. I have not stopped since. At least one person in the world studies from my notes every single day since two thousand thirteen.

The PDF is right here on this page for you to read or download. Learn. Share. Repeat.

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MEMS · BITS Pilani, Dubai Campus · 3

At least one person in the world has studied from my notes every single day since 2013. These MEMS notes are part of that library.

I wrote them in my third year, first semester, at BITS Pilani, Dubai Campus: an electronics and communication course. Micro-electromechanical systems sit at the intersection of semiconductor fabrication and mechanical design. The notes cover microfabrication techniques, microsensor and actuator design, and the applications that put these systems to work. They move from how something is built, to what it senses or actuates, to where it gets used.

I started sharing my handwritten notes online as an undergrad in 2013 so others could learn from them. That turned out to matter more than I expected. Learn. Share. Repeat.

The PDF is embedded on this page. Read it here, or download it to keep.

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Micro-Electromechanical Systems (MEMS)

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